Measuring and testing – Gas analysis – By vibration
Reexamination Certificate
2008-03-11
2008-03-11
Larkin, Daniel S. (Department: 2856)
Measuring and testing
Gas analysis
By vibration
C073S024060, C422S088000
Reexamination Certificate
active
07340941
ABSTRACT:
Sensors for determining the ambient amount (e.g., concentration) of a chemical (e.g., molecular hydrogen in a gas or vapor) are disclosed. Preferred embodiments of these sensors comprise a dense thin metal (e.g., palladium or a palladium alloy) film disposed on a microcantilever beam that is suspended above a stationary baseplate. The dense thin metal film is configured to absorb, for example, hydrogen, thereby causing the film to expand which in turn causes the microcantilever beam to deform. The deformation can be measured, for example, as a change in capacitance between the microcantilever beam and the stationary baseplate. The measured change in capacitance is indicative of the ambient hydrogen concentration.
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Baselt David R.
Fruhberger Bernd
BioTechnology Law Group
Chambers Daniel M.
Larkin Daniel S.
Xsilogy Inc.
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