Dense fluid cleaning centrifugal phase shifting separation...

Imperforate bowl: centrifugal separators – Process

Reexamination Certificate

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C134S001200, C134S031000, C134S033000

Reexamination Certificate

active

07601112

ABSTRACT:
The present invention is an apparatus and process for cleaning substrates using fluids, including dense fluids. A perforated centrifuge drum operates within a pressure vessel. A dense fluid cleaning and management system including suitable process condition sensors provides for exchanging fluid with the pressure vessel.

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patent: 6649532 (2003-11-01), Chen et al.
patent: WO 9623606 (1996-08-01), None
U.S. Environmental Protection Agency, “Demonstration of a Liquid Carbon Dioxide Process for Cleaning Metal Parts”, EPA-600/R-96-131, Nov. 1996.
Darvin, Charles H. et al., “Demonstration of Liquid CO2 as an Alternative for Metal Parts Cleaning”, Precision Cleaning, vol. IV, No. 9, pp. 25-33, Sep. 1996.
Jackson, David P. et al., “Critical Cleaning of Flip Chip Packages Utilizing Dens Phase CO2 Technology”, Nepcon West 2000 Conference, pp. 640-649, Feb. 2000.

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