Demountable vacuum-sealing plate assembly

Details Demountable vacuum-sealing plate assembly Demountable vacuum-sealing plate assembly

1996-05-10

1998-05-19

Williams, Hezron E.

Measuring and testing

Gas analysis

Gas chromatography

738656, 738665, 73431, G01N 3108, G01N 0308

Patent

active

057537950

ABSTRACT:
A detachable, vacuum-sealing plate assembly is provided for vacuum chamber access. The assembly has a demountable hinge, thereby permitting the plate to be swung open or closed, or completely removed from the chamber. The swung-closed plate is automatically pressure-sealed to the chamber during vacuum pump-down by the pressure differential between the interior of the chamber and the outside atmosphere. The plate is released upon vacuum venting, thereby providing swing-open access to the chamber. Functional components may be mounted to the plate. The plate may also have associated high-vacuum electrical fluid flowpath transfer or physical component feed-throughs.

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patent: 5274356 (1993-12-01), Taricco
patent: 5499665 (1996-03-01), Gold et al.

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