Demagnification measurement method for charged particle beam...

Details Demagnification measurement method for charged particle beam... Demagnification measurement method for charged particle beam...

2006-08-22

2006-08-22

Berman, Jack (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492100, C250S307000

Reexamination Certificate

active

07095035

ABSTRACT:
A method for measuring a demagnification of a charged particle beam exposure apparatus includes measuring a first stage position of a mask stage in accordance with a mask stage coordinate system, irradiating a first charged particle beam to a first irradiation position on a specimen through the opening portion of the mask, measuring the first irradiation position in accordance with a specimen stage coordinate system, moving the mask stage to a second stage position, measuring the second stage position of the mask stage, irradiating a second charged particle beam to a second irradiation position on the specimen through the opening portion of the mask measuring the second irradiation position in accordance with the specimen stage coordinate system, and calculating a demagnification of the charged particle beam exposure apparatus from the first and second stage positions and the first and second irradiation positions.

REFERENCES:
patent: 5973333 (1999-10-01), Nakasuji et al.
patent: 7-22349 (1995-01-01), None

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