Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate
2006-01-10
2006-01-10
Chen, Bret (Department: 1762)
Coating processes
Coating by vapor, gas, or smoke
C427S250000, C427S372200
Reexamination Certificate
active
06984415
ABSTRACT:
A method of depositing a metal or other desired material onto a substrate using a gas generated via the sublimation of solid material precursors, wherein a sold precursor is introduced into a liquid in a bubbler apparatus so that the bubbler then contains vapors of solid precursor, and then sweeping a carrier gas through the bubbler to a reactor containing a substrate which is coated with the precursor via chemical vapor deposition.
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McFeely F. Read
Neumayer Deborah A.
Yurkas John J.
Beck Thomas A.
Chen Bret
International Business Machines - Corporation
Underweiser Marian
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