Electric resistance heating devices – Heating devices – Vaporizer
Reexamination Certificate
2005-06-21
2008-10-14
Campbell, Thor S (Department: 3742)
Electric resistance heating devices
Heating devices
Vaporizer
C392S386000
Reexamination Certificate
active
07437060
ABSTRACT:
A delivery system for vaporizing and delivering vaporized solid and liquid precursor materials at a controlled rate having particular utility for semiconductor manufacturing applications. The system includes a vaporization vessel, a processing tool and a connecting vapor line therebetween, where the system further includes an input flow controller and/or an output flow controller to provide a controlled delivery of a vaporizable source material to the vaporization vessel and a controlled flow rate of vaporized source material to the processing tool.
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Baum Thomas H.
Wang Luping
Xu Chongying
Advanced Technology & Materials Inc.
Campbell Thor S
Chappuis Maggie
Hultquist Steven J.
Intellectual Property / Technology Law
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