Delivery systems for efficient vaporization of precursor...

Details Delivery systems for efficient vaporization of precursor... Delivery systems for efficient vaporization of precursor...

2005-06-21

2005-06-21

Campbell, Thor S. (Department: 3742)

Electric resistance heating devices

Heating devices

Vaporizer

C438S680000, C118S715000

Reexamination Certificate

active

06909839

ABSTRACT:
The present invention relates to a delivery system for vaporizing and delivering vaporized solid and liquid precursor materials at a controlled rate having particular utility for semiconductor manufacturing applications. The system includes a vaporization vessel, a processing tool and a connecting vapor line therebetween, where the system further includes an input flow controller and/or an output flow controller to provide a controlled delivery of a vaporizable source material to the vaporization vessel and a controlled flow rate of vaporized source material to the processing tool.

REFERENCES:
patent: 6740586 (2004-05-01), Wang et al.
U.S. Appl. No. 10/288,743, filed Nov. 6, 2002, Luping Wang, et al.
U.S. Appl. No. 10/201,518, filed Jul. 23, 2002, John N. Gregg, et al.

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