Delivery of reactive gas from gas pad to process tool

Details Delivery of reactive gas from gas pad to process tool Delivery of reactive gas from gas pad to process tool

1990-08-24

1992-08-11

Walton, George L.

Fluid handling

With cleaner, lubrication added to fluid or liquid sealing...

Cleaning or steam sterilizing

55 62, 55 74, 141 85, 141 89, 222148, B08B 902, B08B 906

Patent

active

051370476

ABSTRACT:
Remote delivery system for potentially toxic moisture sensitive process gas to a point of use (e.g. CVD system).

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