Drying and gas or vapor contact with solids – Apparatus – With apparatus using centrifugal force
Patent
1981-12-18
1984-05-01
Schwartz, Larry I.
Drying and gas or vapor contact with solids
Apparatus
With apparatus using centrifugal force
34 69, 34187, 361213, F26B 1118
Patent
active
044452810
DESCRIPTION:
BRIEF SUMMARY
DESCRIPTION
1. Technical Field
This invention relates to a dehydrating drier used for dehydrating and drying treated members in a thin form such as silicon wafers, glass for liquid crystal, photo masking glass or lenses.
2. BACKGROUND ART
The conventional dehydrating drier (FIG. 1) used for dehydrating and drying, after washing, silicon wafers, glass for liquid crystal, photo masking glass or lenses comprises a table-like rotor 3 in a housing 2, and a plurality of carrier holders 4 which are fixed to the rotor 3. The silicon wafers or others to be hydrated and dried are installed in a cage-like carrier and then this carrier is inserted into the carrier holder 4. In this state, when the rotor 3 is rotated at a high speed of 500.about.1500 r.p.m. with a power supply turned on, water drops adhering to the silicon wafers or the other members are splattered by centrifugal force, so that the silicon wafers or others will drain. Furthermore, drying gas suctioned by the action of negative pressure which is produced at the central portion due to rotation of the carrier holder 4 dries the surface of the silicon wafers or the other members.
In this prior dehydrating drier, however, the velocity and flow rate of the drying gas flowing on the respective silicon wafers or the other members are not uniform, so that all silicon wafers can not reach a uniformly dried state. Particularly, a drawback that has been experienced is that nonuniformity in drying will occur on a plurality of silicon wafers or other members which are positioned at upper regions in the drier.
Furthermore, in this prior dehydrating drier, the surface of the silicon wafers or the other members which rotate at a high speed together with the rotor is charged with electricity due to friction with the gas, whereby static electricity is produced. No countermeasure to cope with such charging of frictional electricity is provided, so that electrostatic breakdown will occur in the silicon wafers or the other members and dust may attach thereto due to the frictionally charged static electricity, thus resulting in a reduction in yield of the products or a deterioration in quality.
The present invention is a result of the foregoing situations as an improvement thereover and an object of this invention is to provide a dehydrating drier in which drying gas uniformly flows on all silicon wafers or other members so as to achieve a uniformly dried state and static electricity generated on the surface of the silicon wafers or the other members can be positively removed, with a simplified structure.
DISCLOSURE OF INVENTION
A dehydrating drier according to this invention comprises a housing, a plurality of water drop reflection preventing blades disposed in the housing, means comprising a rotor rotatably mounted in the housing at a position inside of the blades for supporting a plurality of thin form objects and for producing a negative pressure upon rotation, the rotor forms a ventilation channel communicating from an outside of the housing and the thin form objects and adapted for passage therethrough of a flow of drying gas from the outside to the thin form objects by the negative pressure produced upon rotation of the rotor, deflectors disposed in the ventilation channel, each of the deflectors comprises a cylindrical portion disposed in an upstream direction of the ventilation channel and a flange portion in a downstream direction of the ventilation channel with respect to the flow of the drying gas, and anti-static electricity means for generating a corona discharge into the ventilation channel and producing ions splattering into the flow of the drying gas, the anti-static electricity means is disposed on the flange portions of the deflectors.
Preferably, the deflectors are disposed concentrically with respect to the ventilation channel.
Furthermore, the improved dehydrating drier according to this invention also includes an electric electricity remover for removing the charged electricity on the dehydrated and dried members supported by the rotor.
In addition
REFERENCES:
patent: 1115051 (1914-10-01), Bonsall
patent: 4236851 (1980-12-01), Szasz
patent: 4333123 (1982-06-01), Moulden
Farber Martin A.
Schwartz Larry I.
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