Gas separation: processes – Solid sorption – Moving sorbent
Reexamination Certificate
2007-05-15
2007-05-15
Lawrence, Frank M. (Department: 1724)
Gas separation: processes
Solid sorption
Moving sorbent
C095S123000, C095S141000, C096S125000, C096S131000
Reexamination Certificate
active
10513754
ABSTRACT:
A dehumidifying system supplies a gas free of organic substances. The dehumidifying system includes a holding case, and a rotor rotatably held in the holding case and bearing an adsorbent. The interior of the holding case is divided into an adsorbing zone and a regenerating zone by partition plates attached to the holding case. A process gas is supplied into the adsorbing zone. The process gas processed in the adsorbing zone is supplied into an objective space. A regenerating gas is supplied into the regenerating zone to eliminate moisture and organic substances adsorbed by the adsorbent in the adsorbing zone from the adsorbent.
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Kurosawa Masaji
Motono Hiroshi
Tanahashi Takashi
Yamashita Katsuhiro
Lawrence Frank M.
Nichias Corporation
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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