Measuring and testing – Fluid pressure gauge – Vibration type
Patent
1989-12-14
1991-02-26
Woodiel, Donald O.
Measuring and testing
Fluid pressure gauge
Vibration type
310338, 310370, G01L 1100
Patent
active
049952650
ABSTRACT:
In the present pressure measurement process the damping signal of a tuning fork quartz manometer, which is a measure of the prevailing pressure, is so combined with the correction value proportional to the resonant frequency that a measurement result is obtained, which is independent of any contamination of the tuning fork quartz. Apart from the resonant frequency (f.sub.R) of the measuring quartz (11), preferably also the resonant frequency (f.sub.R ') of a reference quartz (21) kept at constant pressure is determined. Thus, the damping signal (R.sub.S) can be corrected by a correction value proportional to the difference between the two reference frequencies (R.sub.R '-f.sub.R), which is substantially temperature-independent.
REFERENCES:
patent: 4507970 (1985-04-01), Dinger
patent: 4741213 (1988-05-01), Hojoh
Design and Testing of a Quarty Friction Vacuum Gauge Using a Self-Oscillating Circuit, by M. Hirata et al, 1987, American Vacuum Society, pp. 2393-2396.
Frequency Dependence of a Quartz Oscillator on Gas Pressure by K. Kokubuin et al, Jun. 3, 1985; 1985 American Vacuum Soc.
Unified Formula Describing the Impedence Dependence of a Oscillator on Gas Pressure by K. Kokubun et al; Jan. 5, 1987; 1987 American Vacuum Society.
Balzers Aktiengesellschaft
Woodiel Donald O.
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