Defraction photoelectric position measuring system

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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350 9612, G01B 902

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active

049233009

ABSTRACT:
Several photoelectric position measuring systems are described which utilize diffraction gratings to define the reference magnitude. Diffracted component beams are introduced by means of coupling-in gratings that have different grid constants from one another into optical waveguides to a coupler and there brought into interference. The interfering component beams are conducted from the outputs of the coupler via optical waveguides to detectors which transform them into electrical signals which are phase-shifted with respect to one another. Displacement of the diffraction grating is a measure for the position change to be measured of one machine component mounted for translation relative to another.

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"Theory of Prism-Firm Coupler and Thin-Film Light Guides", J. Optical Soc. of America, vol. 60, (1970), pp. 1325-1337, Tien, et al.

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