Deformation-based contact lithography systems, apparatus and...

Details Deformation-based contact lithography systems, apparatus and... Deformation-based contact lithography systems, apparatus and...

2006-10-12

2009-11-17

Rosasco, Stephen (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

Reexamination Certificate

active

07618752

ABSTRACT:
One or more of a contact lithography module, a pattern tool and a substrate include a strain control region to prevent deformation-related misalignment.

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Xing Cheng et al., “One-Step Lithography for Various Size Patterns With A Hybrid Mask-Mold,” Microelectronics Engineering, 71, 2004, pp. 288-293.

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