Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-04-05
2005-04-05
Dang, Hung Xuen (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S223100
Reexamination Certificate
active
06876484
ABSTRACT:
A MEMS device having a deformable segmented mirror. The mirror includes a plurality of movable segments supported on a substrate using spring vertices, each vertex having a fixed plate and one or more springs. In a representative embodiment, three springs support each movable segment, where each spring connects the movable segment to a different spring vertex. The MEMS device also has a plurality of electrodes, each of which can be individually biased. A movable segment moves in response to a voltage applied to an electrode located beneath that segment while the deformed springs attached to the segment provide a restoring force. Due to the fixed plates, motion of each movable segment is substantially decoupled from that of the adjacent segments, which makes the shape of the segmented mirror relatively easy to control. In addition, segments in a deformable mirror of the invention can be displaced by a distance that is significantly larger than the maximum deformation amplitude for a membrane mirror of the prior art. The MEMS device can be fabricated using two silicon-on-insulator (SOI) wafers and an etch fabrication technique.
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Dang Hung Xuen
Lucent Technologies - Inc.
Tra Tuyen
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