Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-01-11
2005-01-11
Ben, Loha (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S298000, C359S198100, C359S223100, C359S224200, C359S822000, C359S849000, C359S872000
Reexamination Certificate
active
06842277
ABSTRACT:
A deformable mirror arrangement has a plurality of constraint mechanisms contacting a deformable mirror at specified contact positions. At least three of these constraint mechanisms are rigid body servo control mechanisms such as high-bandwidth servo control mechanisms, each including a force actuator contacting the mirror at a corresponding one of the contact positions, a position sensor assisting to measure position of the mirror and a servo control unit for controlling the force actuator.
REFERENCES:
patent: 5115351 (1992-05-01), Miyawaki et al.
patent: 5406405 (1995-04-01), Sullivan
patent: 5414565 (1995-05-01), Sullivan et al.
patent: 6115166 (2000-09-01), Kotaki
patent: 6155690 (2000-12-01), Miyahara et al.
patent: 6188502 (2001-02-01), Aoki
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patent: 6636339 (2003-10-01), Lee
patent: 6735004 (2004-05-01), Hagelin et al.
U.S. patent application No. 09/779,944,Multiple Point Support Assembly For A Stage, Mike Binnard, et al., filed Feb. 8, 2001, now abandoned.
Ben Loha
Beyer Weaver & Thomas LLP
Nikon Corporation
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