Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2009-02-26
2010-06-15
Choi, William C (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S221200, C359S291000
Reexamination Certificate
active
07738159
ABSTRACT:
A deformable mirror system includes a deformable mirror, which comprises a deformation part with a reflection surface formed thereon, a fixing part configured to fix the deformation part, and a pair of electrodes disposed facing the deformation part and the fixing part, respectively, and a deformable mirror drive device. The deformable mirror drive device includes a drive unit configured to generate drive force so as to deform the deformation part, a capacitance detection unit configured to detect capacitance between the pair of electrodes, a conversion unit configured to convert a target deformation quantity signal into a target capacitance signal on the basis of a relationship between the capacitance and deformation quantity of the deformation part, and a control unit configured to decide drive force generated from the drive unit so as to coincide an output from the conversion unit with an output from the capacitance detection unit.
REFERENCES:
patent: 7088492 (2006-08-01), Yanagita et al.
patent: 7190500 (2007-03-01), Ide et al.
Choi William C
Olympus Corporation
Scully , Scott, Murphy & Presser, P.C.
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