Deformable mirror, in particular for a laser beam material machi

Details Deformable mirror, in particular for a laser beam material machi Deformable mirror, in particular for a laser beam material machi

1995-06-16

1998-07-07

Shafer, Ricky D.

Optical: systems and elements

Mirror

Fluid cooled mirror

359846, 359848, 359224, G02B 7182, G02B 7185, G02B 7195, G02B 7198

Patent

active

057778078

ABSTRACT:
A deformable mirror for a laser beam material machining apparatus including a housing for supporting a mirror plate, an electro-mechanical actuator disposed within a jacket tube, a pressure portion disposed at one end of the actuator and a rear end adaptor with a prestressing screw at the other end of the actuator for operatively acting on the mirror plate. The materials of the jacket tube and the housing as well as the materials of the pressure portion and the rear end adaptor are so selected on the basis of their linear coefficients of thermal expansion, such that a temperature change will cause essentially similar overall linear expansion.

REFERENCES:
patent: 4679915 (1987-07-01), Kriz et al.
patent: 4831291 (1989-05-01), Ames
patent: 4861149 (1989-08-01), Ealey
patent: 5020895 (1991-06-01), Giesen et al.
patent: 5037190 (1991-08-01), Ealey et al.
patent: 5204784 (1993-04-01), Spinhirne
patent: 5210653 (1993-05-01), Schell
patent: 5357825 (1994-10-01), Costello et al.
patent: 5617261 (1997-04-01), Bar et al.

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