Deformable mirror device and apparatus for observing retina...

Details Deformable mirror device and apparatus for observing retina... Deformable mirror device and apparatus for observing retina...

2008-08-05

2010-06-29

Dinh, Jack (Department: 2873)

Optics: eye examining, vision testing and correcting

Eye examining or testing instrument

Objective type

C359S291000, C359S295000, C359S847000

Reexamination Certificate

active

07744220

ABSTRACT:
A deformable mirror device includes a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member opposite from the first face; a deformable electrode film formed below the first face of the support member so as to be opposed to the electrodes with a distance and so as to cover the opening; an insulation film provided between the deformable electrode film and the support member; and a reflection film provided on a face of the deformable electrode film opposite from the electrodes so as to overlap the opening. The electrodes are electrically insulated each other by a plurality of grooves radially extending from a region which includes a position corresponding to a center of the opening.

REFERENCES:
patent: 6986587 (2006-01-01), Kaneko
patent: 7474455 (2009-01-01), Nishio et al.
patent: 7566947 (2009-07-01), Yang
patent: 2-101402 (1990-04-01), None
Masunishi, “Deformable Mirror Device and Apparatus for Observing Retina of Eye Using The Same”, U.S. Appl. No. 12/188,018, filed Aug. 7, 2008.

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