Deformable mirror device and apparatus for observing retina...

Details Deformable mirror device and apparatus for observing retina... Deformable mirror device and apparatus for observing retina...

2007-12-18

2009-10-20

Choi, William C (Department: 2873)

Optics: eye examining, vision testing and correcting

Eye examining or testing instrument

Objective type

C359S847000, C359S295000

Reexamination Certificate

active

07604353

ABSTRACT:
It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.

REFERENCES:
patent: 5223971 (1993-06-01), Magel
patent: 2004/0201908 (2004-10-01), Kaneko
patent: 02-101402 (1990-04-01), None
patent: 2004-157527 (2004-06-01), None

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