Deformable mirror and information device having the...

Optical: systems and elements – Optical modulator – Light wave directional modulation

Reexamination Certificate

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Details

C369S112100, C369S044230, C369S053190

Reexamination Certificate

active

06995897

ABSTRACT:
A deformable mirror according to the invention comprises a substrate, a reflector which is supported by said substrate and the shape of whose reflecting areas is variable, and a plurality of drive units for independently driving a plurality of regions of the reflector and thereby controlling the distances between said plurality of regions and said substrate. Each of the plurality of drive units comprises a plurality of electrodes disposed over said substrate, a tilt member which is rotated round the axis of tilt by being attracted by the selected one of the plurality of electrodes, and an action member for varying the distance between a specific region of the reflector and said substrate following the motion of the tilt member.

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