Deformable mirror and device for observing retina of eye

Details Deformable mirror and device for observing retina of eye Deformable mirror and device for observing retina of eye

2008-03-18

2008-03-18

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S295000

Reexamination Certificate

active

07345808

ABSTRACT:
A deformable mirror, in which the distance between an electrode substrate and a membrane can be accurately maintained and which can be produced at a low material cost, is provided. The deformable mirror comprises: an electrode substrate11having a plurality of electrodes (16a,16b,16c,16dand16e) formed on a surface of the electrode substrate; a silicon membrane13having a counter electrode opposed to the plurality of electrodes formed on the electrode substrate11; a reflection section15provided on the side of the silicon membrane13opposite the counter electrode; and a support plate19integrally bonded to the electrode substrate11for restraining the displacements of the plurality of electrodes which adversely affect the deformation of the silicon membrane13, in which a plurality of layers of wiring patterns (11a,11b,11c,11dand11e) for supplying drive voltages to the plurality of electrodes are formed in the electrode substrate11.

REFERENCES:
patent: 6042223 (2000-03-01), Katakura
patent: 6108121 (2000-08-01), Mansell et al.
patent: 6572230 (2003-06-01), Levine
patent: 11-137522 (1999-05-01), None
patent: 2003-125279 (2003-04-01), None

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