Deformable chuck driven by piezoelectric means

Details Deformable chuck driven by piezoelectric means Deformable chuck driven by piezoelectric means

1984-01-10

1985-03-19

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

279 3, H01L 4108

Patent

active

045061840

ABSTRACT:
A deformable vacuum pin chuck includes a thin silicon chuck for supporting a semiconductor wafer during lithographic processing and a number of piezoelectric transducers for selectively deforming the chuck. Chuck deformation caused by application of electric potentials to selected transducers may be used to correct flatness deviations in the wafer and, thereby, a desired degree of flatness of the semiconductor wafer may be obtained.

REFERENCES:
patent: 3904274 (1975-09-01), Feinleib et al.
patent: 4391511 (1983-07-01), Akiyama et al.
Three-Actuator Deformable Water-Cooled Mirror, by Fuschetto, SPIE, vol. 179, Adaptive Optical Components, 11, (1979), pp. 18-27.
Monolithic Piezoelectric Mirror for Wavefront Correction, by Feinleib et al, Applied Physics Letters, vol. 25, No. 5, Sep. 1974, pp. 311-313.

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