Deflection signal compensation for charged particle beam

Details Deflection signal compensation for charged particle beam Deflection signal compensation for charged particle beam

2006-05-12

2009-08-04

Vanore, David A. (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492100, C250S492200, C250S493100, C250S397000, C250S398000

Reexamination Certificate

active

07569841

ABSTRACT:
Charged particles that are in transit through a deflection system when the beam is repositioned do not received the correct deflection force and are misdirected. By independently applying signals to the multiple stages of a deflection system, the number of misdirected particles during a pixel change is reduced.

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