Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-03-13
2007-03-13
Mack, Ricky (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S224200, C359S292000, C359S295000, C359S298000
Reexamination Certificate
active
11082765
ABSTRACT:
The present invention provides a deflection mirror including a mirror substrate having a mirror face that reflects a light, a beam, and a supporting member that supports the mirror substrate through the beam. A movable electrode is formed at a free side of the mirror substrate. A fixed electrode is operably linked through the movable electrode at a gap that is formed in the supporting member. The mirror substrate is driven by electrostatic force between the movable electrode and the fixed electrode and vibrates centering of the beam. An end of at least one of the fixed electrode and the movable electrode is smaller in the thickness direction than the other end.
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Mack Ricky
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Ricoh & Company, Ltd.
Tra Tuyen
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