Electric lamp and discharge devices – With positive or negative ion acceleration – Means for deflecting or focusing
Patent
1987-05-20
1989-02-14
Moore, David K.
Electric lamp and discharge devices
With positive or negative ion acceleration
Means for deflecting or focusing
31511181, 250396ML, 2504923, 335210, 335298, H01J 724, H05B 3126
Patent
active
048048798
ABSTRACT:
A deflecting electromagnet having bow-shaped pole pieces 7b,7a disposed at input and output side end surfaces 6b,6a, respectively, of a main pole piece 6 which deflects and focuses an ion beam 2 generated by an ion source 1. The respective bow-shaped pole pieces are rotatably contacted with the side end surfaces of the main pole piece. Wedge-shaped pole pieces 8b,8a, are disposed in freely slidable contact with the planar surfaces of each of the bow-shaped pole pieces, respectively. The deflecting electromagnet constructed as above can be used to easily establish and adjust the effective borders of the magnetic field to a desirable position to establish and adjust, as desired, and the angle of the faces of the deflecting electromagnet at which the ion beam is inputted and outputted.
REFERENCES:
patent: 3418538 (1968-12-01), Roman
patent: 4634931 (1987-01-01), Taya et al.
Ion Beams with Applications to Ion Implanation, Wilson and Brewer, 1973, pp. 207-213.
Japanese Magazine "Denshi Gijyutu", vol. 15, No. 6, pp. 117-123.
Mitsubishi Denki & Kabushiki Kaisha
Moore David K.
Wieder K.
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