Deflectable micromirrors with stopping mechanisms

Details Deflectable micromirrors with stopping mechanisms Deflectable micromirrors with stopping mechanisms

2002-05-24

2004-05-25

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

Reexamination Certificate

active

06741383

ABSTRACT:

The present invention pertains generally to the field of micro-electromechanical systems (MEMS). More specifically, the present invention pertains to the field of MEMS spatial light modulators and systems and beam steering devices, such as display projection systems, printing systems, and light beam switching systems that utilize MEMS components.


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