Defective product inspection apparatus, probe positioning...

Scanning-probe techniques or apparatus; applications of scanning – Particular type of scanning probe microscopy or microscope;... – Scanning tunnelling microscopy or apparatus therefor – e.g.,...

Reexamination Certificate

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Details

C850S032000, C850S040000, C850S001000, C850S005000, C250S442110, C250S309000

Reexamination Certificate

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08074293

ABSTRACT:
For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.

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German Office Action issued in Patent Application No. 10 2004 058 483.4-35 dated on Jul. 31, 2008.

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