Scanning-probe techniques or apparatus; applications of scanning – Auxiliary means serving to assist or improve the scanning...
Reexamination Certificate
2007-10-23
2009-06-30
Vanore, David A. (Department: 2881)
Scanning-probe techniques or apparatus; applications of scanning
Auxiliary means serving to assist or improve the scanning...
C850S009000, C250S306000, C250S310000
Reexamination Certificate
active
07553334
ABSTRACT:
For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.
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German Office Action issued in Patent Application No. 10 2004 058 483.4-35 dated on Jul. 31, 2008.
Furukawa Takashi
Hazaki Eiichi
Inada Yoshikazu
Kato Susumu
Mitsui Yasuhiro
Hitachi High-Technologies Corporation
McDermott Will & Emery LLP
Vanore David A.
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