Defect review apparatus and method of reviewing defects

Details Defect review apparatus and method of reviewing defects Defect review apparatus and method of reviewing defects

2011-01-11

2011-01-11

Nghiem, Michael P (Department: 2863)

Data processing: measuring, calibrating, or testing

Calibration or correction system

Position measurement

C250S559290

Reexamination Certificate

active

07869969

ABSTRACT:
A defect review apparatus for reviewing a specimen by moving the specimen to pre-calculated coordinate includes: a function to measure a deviation amount between the pre-calculated coordinates and coordinates of an actual position of the specimen; a function to optimize a coordinate correcting expression to minimize the measured deviation amount; and a function to determine that the deviation amounts have converged. When the deviation amounts have converged, the measurement for the coordinate-correcting-expression optimization is terminated, minimizing a reduction in throughput. field of view (FOV) necessary for the specimen to be within the FOV is set according to a convergence value of the calculated deviation amount.

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Sullivan et al., SEM/EDS Analysis Method for Bare Silicon Particle Monitor Wafers, 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, pp. 293-296.

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