Defect management system for productivity and yield improvement

Details Defect management system for productivity and yield improvement Defect management system for productivity and yield improvement

1995-10-06

1998-06-02

Trammell, James P.

Boots, shoes, and leggings

364552, G06F 1900

Patent

active

057610649

ABSTRACT:
An automated wafer defect management system in which wafer defect data are collected from wafer inspection instruments, converted into a standard data format and made available through a central database system to workstations for review, analysis, and evaluation.

REFERENCES:
patent: 4878179 (1989-10-01), Larsen et al.
patent: 5206582 (1993-04-01), Ekstedt et al.
patent: 5355320 (1994-10-01), Erjavic et al.
patent: 5390129 (1995-02-01), Rhodes
patent: 5511005 (1996-04-01), Abbe et al.
patent: 5598341 (1997-01-01), Ling et al.

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