Defect inspection method and apparatus, and defect display metho

Details Defect inspection method and apparatus, and defect display metho Defect inspection method and apparatus, and defect display metho

1994-10-05

1997-09-02

Le, Que

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

25055906, 356431, 382149, G01N 2186

Patent

active

056635699

ABSTRACT:
In a defect inspection method, inspection light is irradiated onto the surface to be inspected of an object to be inspected, a defect on the surface to be inspected is detected on the basis of a signal obtained by photoelectrically converting scattered light of the inspection light from the surface to be inspected, and the size of the detected defect is determined. When a plurality of defects are detected, the detected defects are observed at a predetermined magnification in the order from larger defects on the basis of the determination result. When a defective portion is found as a result of the observation, defect inspection of the object to be inspected is terminated.

REFERENCES:
patent: 4978224 (1990-12-01), Kishimoto et al.
patent: 4982105 (1991-01-01), Takahashi

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