Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2006-10-20
2008-05-13
Monbleau, Davienne (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C250S559400, C250S559440, C356S237100, C356S237200, C356S237300
Reexamination Certificate
active
07372062
ABSTRACT:
A defect inspection device which inspects for surface defects in substrates, and which includes an illumination section that irradiates the substrate with illumination light having a variable incident angle, and a light-receiving section that receives light from the substrate irradiated with illumination light from the illumination section with a variable detection angle. The light-receiving section receives diffracted light emitted in substantially the same direction as the direction of incidence of the illumination light from the illumination section.
REFERENCES:
patent: 6407818 (2002-06-01), Whitehouse
patent: 6501545 (2002-12-01), Komuro et al.
patent: 6515745 (2003-02-01), Vurens et al.
patent: 6816250 (2004-11-01), Shuster et al.
patent: 6950196 (2005-09-01), Fielden et al.
patent: 6954012 (2005-10-01), Lau
patent: 6954268 (2005-10-01), Naiki et al.
patent: 7123357 (2006-10-01), Meeks
patent: 2002/0017620 (2002-02-01), Oomori et al.
patent: 2002/0024659 (2002-02-01), Tanaka
patent: 2004/0174518 (2004-09-01), Naiki et al.
patent: 2005/0116187 (2005-06-01), Uda et al.
patent: 63-143831 (1988-06-01), None
patent: 63-205775 (1988-08-01), None
patent: 3-102845 (1991-04-01), None
patent: 07-027709 (1995-01-01), None
patent: 7-198620 (1995-08-01), None
patent: 8-247957 (1996-09-01), None
patent: 09-061365 (1997-03-01), None
patent: 2003-28805 (2003-01-01), None
patent: 2003-344295 (2003-12-01), None
patent: WO 01/71323 (2001-09-01), None
English Abstract of JP 2003-028805 (cited on Applicant's IDS dated Oct. 20, 2006).
English Abstract of JP 63-205775 (cited on Applicant's IDS dated Oct. 20, 2006).
English Abstract of JP 08-247957 (cited on Applicant's IDS dated Oct. 20, 2006).
English translation of JP 2003-344295 (cited on Applicant's IDS dated Oct. 20, 2006).
Frishauf Holtz Goodman & Chick P.C.
Monbleau Davienne
Olympus Corporation
LandOfFree
Defect inspection device and substrate manufacturing system... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Defect inspection device and substrate manufacturing system..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Defect inspection device and substrate manufacturing system... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3985327