Defect inspection device and substrate manufacturing system...

Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet

Reexamination Certificate

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Details

C250S559400, C250S559440, C356S237100, C356S237200, C356S237300

Reexamination Certificate

active

07372062

ABSTRACT:
A defect inspection device which inspects for surface defects in substrates, and which includes an illumination section that irradiates the substrate with illumination light having a variable incident angle, and a light-receiving section that receives light from the substrate irradiated with illumination light from the illumination section with a variable detection angle. The light-receiving section receives diffracted light emitted in substantially the same direction as the direction of incidence of the illumination light from the illumination section.

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