Defect inspecting apparatus using multiple color light to detect

Details Defect inspecting apparatus using multiple color light to detect Defect inspecting apparatus using multiple color light to detect

1990-07-20

1991-12-10

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250226, 356237, G01N 2188

Patent

active

050721283

ABSTRACT:
A defect inspecting apparatus for discriminating one of two surfaces of a flat transparent object such as a pericle. The flat object is irradiated with a beam of light which is supplied from a light source and which is multiple-color light having predetermined wavelength ranges or white light of a broad band, scattered light from the defect is received by an optical element having wavelength selectivity, and scattered lights thereby separated with respect to the particular wavelength ranges are photoelectrically detected. The intensities of photoelectric signals thereby obtained are compared with each other.

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patent: 4889998 (1989-12-01), Hayano et al.
patent: 4966457 (1990-10-01), Hayano et al.

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