Defect detector and method of detecting defect

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition

Reexamination Certificate

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Reexamination Certificate

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07099002

ABSTRACT:
A defect detector having: a first optical system including a first light source to irradiate a surface of a subject with coaxial incident-light while scanning, and a first imaging device to receive light regularly reflected from the subject and change the light to a first electrical signal to form a first electrical image; a second optical system including a second light source to irradiate the surface of the subject with inclined light while scanning, and a second imaging device to receive light scattered at the subject and change the light to a second electrical signal to form a second electrical image, in which the inclined light of the second light source does not meet the coaxial incident-light of the first light source; and a computer to compare the first electrical signal with a predetermined first threshold to detect a concavo-convex defect on the surface of the subject, and to compare the second electrical signal with a predetermined second threshold to detect a blocky color defect on the surface of the subject.

REFERENCES:
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patent: 3975102 (1976-08-01), Rosenfeld et al.
patent: 4865445 (1989-09-01), Kuriyama et al.
patent: 5825499 (1998-10-01), Biedermann
patent: 5940175 (1999-08-01), Sun
patent: 6046803 (2000-04-01), Toh
patent: 6196127 (2001-03-01), Yamamoto et al.
patent: 7-55710 (1995-03-01), None
patent: 7-110305 (1995-04-01), None
patent: 07-128240 (1995-05-01), None
patent: 07-128241 (1995-05-01), None
patent: 09-325120 (1997-12-01), None
patent: 10-206335 (1998-08-01), None
patent: 2000-137004 (2000-05-01), None
patent: WO 96/39619 (1996-12-01), None
Patent Abstracts of Japan, JP 7-128240, May 19, 1995.
Patent Abstracts of Japan, JP 62-038348, Feb. 19, 1987.

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