Defect detector and defect detecting method

Details Defect detector and defect detecting method Defect detector and defect detecting method

2003-11-27

2008-08-26

Stafira, Michael P (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237400

Reexamination Certificate

active

07417721

ABSTRACT:
A defects inspecting apparatus having: a scanning stage for running into a predetermined direction while mounting an inspection target substrate thereon; an illumination optic system for irradiating an illumination light beam upon a surface of the inspection target substrate at a predetermined angle inclined thereto; a detection optic system including, an upper-directed photo-detector for receiving upper-directed reflected/scattered lights emitting upwards from the inspection target substrate, thereby converting them into an upper-directed image signal, and a side-directed photo-detector for receiving side-directed reflected/scattered lights emitting for the inspection target substrate into an inclined direction, so as to flatly intersects the illumination light beam, and thereby converting into a side-directed image signal; and a signal processing system-for detecting defects upon basis of the upper-directed image signal and the side-directed image signal.

REFERENCES:
patent: 5424536 (1995-06-01), Moriya
patent: 5936726 (1999-08-01), Takeda et al.
patent: 62-089336 (1987-04-01), None
patent: 63-135848 (1988-06-01), None
patent: 01-117024 (1989-05-01), None
patent: 01-250847 (1989-10-01), None
patent: 05-129399 (1993-05-01), None
patent: 06-242012 (1994-09-01), None
patent: 06-258239 (1994-09-01), None
patent: 06-324003 (1994-11-01), None
patent: 07-083840 (1995-03-01), None
patent: 08-210989 (1996-08-01), None
patent: 08-271437 (1996-10-01), None
patent: 11-237344 (1999-08-01), None
patent: 2000-105203 (2000-04-01), None
patent: 2000-162141 (2000-06-01), None
patent: 2001-060607 (2001-03-01), None
patent: 2001-264264 (2001-09-01), None

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