Defect detection method

Details Defect detection method Defect detection method

2005-05-27

2008-03-04

Nguyen, Ha Tran (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

07339391

ABSTRACT:
A defect detection method is disclosed, in which the method includes: providing a semiconductor sample, wherein the semiconductor sample comprises at least one defect; utilizing a failure analysis for detecting at least one suspected area on the backside of the semiconductor sample; utilizing a physical energy for forming a plurality of reference marks around the suspected area on the backside of the semiconductor sample; and utilizing the reference marks for determining the relative location of the defect on the front side of the semiconductor sample.

REFERENCES:
patent: 5804980 (1998-09-01), Nikawa
patent: 6405359 (2002-06-01), Tseng et al.
patent: 6559670 (2003-05-01), Motamedi
patent: 6686757 (2004-02-01), Ring et al.
patent: 7079966 (2006-07-01), Knoch et al.
patent: 2003/0095699 (2003-05-01), Hung et al.

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