Defect detection apparatus and defect detection method

Details Defect detection apparatus and defect detection method Defect detection apparatus and defect detection method

2006-06-13

2006-06-13

Hindi, Nabil (Department: 2655)

Dynamic information storage or retrieval

Condition indicating, monitoring, or testing

Including radiation storage or retrieval

C369S053320

Reexamination Certificate

active

07061840

ABSTRACT:
A subtraction results value arrived at by subtracting a required subtraction value from a detection maximum value is taken as a maximum value in cases where a detection maximum value obtained from an RF signal is in a reducing direction, and an addition results value arrived at by adding a required value to a detection minimum value is taken as a minimum value in cases where a detection minimum value obtained from an RF signal is in an increasing direction. An RF amplitude value indicating an amplitude level of an RF signal is then obtained by subtracting the minimum value from the maximum value. Also, the subtraction value or the addition value is variably set according to the center value for the amplitude of the RF signal increasing or decreasing in excess of a prescribed level. As a result, accuracy of defect detection can be improved in cases where the amplitude level of the RF signal is biased on the maximum value side or the minimum value side.

REFERENCES:
patent: 6762982 (2004-07-01), Armitage
patent: 5-273141 (1993-10-01), None
patent: 2002-183950 (2002-06-01), None
International Search Report.

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