Defect detection and defect removal apparatus of thin film elect

Electric heating – Metal heating – By arc

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21912169, B23K 2602

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active

053650344

ABSTRACT:
A laser beam is irradiated and scanned on a substrate of a liquid crystal display device of an active matrix type. Pairs of electrons and holes caused by the known internal photoelectric effect are produced by irradiation of the laser beam to electrical conductive thin films including silicon layered on the substrate, and pass through a defective part of short circuit in an intersection of the plural electrical conductive thin films, and thereby a current flowing through the intersection increases and a position of the defect determined on the basis of the scanning position of the laser beam and the increase of the current.

REFERENCES:
patent: 4240094 (1980-12-01), Mader
patent: 4259367 (1981-03-01), Dougherty, Jr.
patent: 4358659 (1982-11-01), Spohnheimer
Katayama et al.: High-Resolution Full-Color LCDs Addressed by Double-Layered Gate-Insulator a-SI TSTs SID 88 Digest; pp. 310-313.
Henley, F. J.: "Flat-Panel in-Process Test, Repair and Inspection: An Overview"; SID 92 Digest; pp. 623-627.
"7 Laser Microscope" of `Forefront of Laser Technology`, published on Nov. 30, 1992 from Nikkei Gijutsu Tosho Co., Ltd.; pp. 222-229.

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