Defect detecting method and device

Details Defect detecting method and device Defect detecting method and device

1999-01-26

2000-09-26

Pham, Hoa Q.

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

3562375, 3562391, 356318, 356417, G01N 2100

Patent

active

061249262

ABSTRACT:
A defect detecting method and a defect detecting device are provided. An image is formed by scattered light and emitted light from a specimen when a laser beam enters the specimen, and the image is then divided into a plurality of images of different wavelength bands, so that defects can be detected from the plurality of picked up images. Also, scattered light and emitted light incident upon a single objective lens system are divided into a plurality of different wavelength bands and picked up as a plurality of images. The plurality of images of the plurality of different wavelength bands are then combined and displayed in different colors.

REFERENCES:
patent: 4692690 (1987-09-01), Hara et al.
patent: 5032735 (1991-07-01), Kobayashi et al.
patent: 5524152 (1996-06-01), Bishop et al.
patent: 5894345 (1999-04-01), Takamoto et al.
patent: 5936726 (1999-08-01), Takeda et al.

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