Defect detecting method and defect detecting device

Details Defect detecting method and defect detecting device Defect detecting method and defect detecting device

2011-07-12

2011-07-12

Ahmed, Samir A (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C382S141000, C348S246000

Reexamination Certificate

active

07978903

ABSTRACT:
A defect detecting method includes: an image acquiring process for capturing an image of an inspection object having an identical sequence of pattern and acquiring the image; and a defect emphasizing process for emphasizing a defect of the captured image. The defect emphasizing process includes: an inspected-point selecting process for sequentially selecting an inspection point on the captured image; and a defect emphasizing value calculating process for obtaining differences by subtracting from a luminance value of the selected inspection point each luminance value of a plurality of comparison points disposed around the inspection point and selecting one difference of the smallest value of the obtained differences in luminance to determine a defect emphasizing value of the inspection point.

REFERENCES:
patent: 6799130 (2004-09-01), Okabe et al.
patent: 2006/0012694 (2006-01-01), Yoneda et al.
patent: 2002-259951 (2002-09-01), None
patent: 2004-028836 (2004-01-01), None
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patent: 2005-140655 (2005-06-01), None
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patent: 2006-145228 (2006-06-01), None
Handbook of Image Analysis (Revised Edition), 2004, p. 1900-1903.

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