Defect classifier using classification recipe based on...

Details Defect classifier using classification recipe based on... Defect classifier using classification recipe based on...

2011-08-02

2011-08-02

Mehta, Bhavesh M (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C382S144000

Reexamination Certificate

active

07991217

ABSTRACT:
In apparatuses for automatically acquiring and also for automatically classifying images of defects present on a sample such as a semiconductor wafer, a classifying system is provided which are capable of readily accepting even such a case that a large number of classification classes are produced based upon a request issued by a user, and also even such a case that a basis of the classification class is changed in a high frequency. When the user defines the classification classes, a device for designating attributes owned by the respective classification classes is provided. The classifying system automatically changes a connecting mode between an internally-provided rule-based classifier and an example-based classifier, so that such a classifying system which is fitted to the classification basis of the user is automatically constructed.

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Office Action issued in Japanese Patent Application No. 2006-049487 on Aug. 3, 2010.

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