Measuring and testing – Testing of material
Reexamination Certificate
2011-03-08
2011-03-08
Raevis, Robert R (Department: 2856)
Measuring and testing
Testing of material
Reexamination Certificate
active
07900526
ABSTRACT:
A method and system for identifying and classifying non-uniformities on the surface of a semiconductor or in a semiconductor. The method and system involves scanning the wafer surface with a non-vibrating contact potential difference sensor to detect the locations of non-uniformities, extracting features characteristic of the non-uniformities, and applying a set of rules to these features to classify the type of each non-uniformity.
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Hawthorne Jeffrey Alan
Schulze Mark
Steele M. Brandon
Yang Yeyuan
Foley & Lardner LLP
QCEPT Technologies, Inc.
Raevis Robert R
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