Defect analysis sampling control

Details Defect analysis sampling control Defect analysis sampling control

2005-11-22

2005-11-22

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C702S083000

Reexamination Certificate

active

06968251

ABSTRACT:
A defect analysis sampling control system comprising a base setting module, a lot setting module, and a work in process (WIP) prediction module. The base setting module is used for choosing and setting a corresponding sampling rule in accordance with different semiconductor products and the lot setting module is used for choosing and setting a corresponding lot sampling rule in accordance with a product lot. The work in process (WIP) prediction module records all WIP products to provide status and progress of the WIP product. The present invention can be applied to a variety of products so as to control and adjust the sampling rule for all products more conveniently and arrange the sampling rules more flexibly.

REFERENCES:
patent: 6477432 (2002-11-01), Chen et al.
patent: 6577972 (2003-06-01), Yanaru et al.
patent: 2002/0193899 (2002-12-01), Shanmugasundram et al.
patent: 2005/0033467 (2005-02-01), Purdy

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