Deep ultraviolet unit-magnification projection optical...

Details Deep ultraviolet unit-magnification projection optical... Deep ultraviolet unit-magnification projection optical...

2007-02-13

2007-02-13

Harrington, Alicia M (Department: 2873)

Optical: systems and elements

Lens

With reflecting element

C359S773000, C355S067000

Reexamination Certificate

active

11052239

ABSTRACT:
A 1× projection optical system for deep ultra-violet (DUV) photolithography is disclosed. The optical system is a modified Dyson system capable of imaging a relatively large field at high numerical apertures at DUV wavelengths. The optical system includes a lens group having first and second prisms and four lenses having a positive-negative-positive negative arrangement as arranged in order from the prisms toward the mirror. A projection photolithography system that employs the projection optical system of the invention is also disclosed.

REFERENCES:
patent: 4103989 (1978-08-01), Rosin
patent: 4171870 (1979-10-01), Bruning et al.
patent: 4391494 (1983-07-01), Hershel
patent: 4425037 (1984-01-01), Hershel et al.
patent: 4964705 (1990-10-01), Markle
patent: 5031977 (1991-07-01), Gibson
patent: 5040882 (1991-08-01), Markle
patent: 5161062 (1992-11-01), Shafer et al.
patent: 5559629 (1996-09-01), Sheets et al.
patent: 5805356 (1998-09-01), Chiba
patent: 5835195 (1998-11-01), Gibson et al.
patent: 6157497 (2000-12-01), Kumazawa
patent: 6381077 (2002-04-01), Jeong et al.

Affiliated with

Also associated with

Rating

Deep ultraviolet unit-magnification projection optical... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Deep ultraviolet unit-magnification projection optical..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Deep ultraviolet unit-magnification projection optical... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3850298