Deep ultraviolet unit-magnification projection optical...

Details Deep ultraviolet unit-magnification projection optical... Deep ultraviolet unit-magnification projection optical...

2005-03-08

2005-03-08

Nguyen, Judy (Department: 2851)

Optics: image projectors

Light shield, mask, hood, or diaphragm

C353S081000, C359S355000, C359S487030, C359S730000, C359S773000, C359S364000, C355S067000

Reexamination Certificate

active

06863403

ABSTRACT:
A 1X projection optical system for deep ultra-violet (DUV) photolithography is disclosed. The optical system is a modified Dyson system capable of imaging a relatively large field at high numerical apertures at DUV wavelengths. The optical system includes a lens group having first and second prisms and four lenses having a positive-negative-positive negative arrangement as arranged in order from the prisms toward the mirror. A projection photolithography system that employs the projection optical system of the invention is also disclosed.

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