Deep ultraviolet photolithographically defined ultra-thin films

Details Deep ultraviolet photolithographically defined ultra-thin films Deep ultraviolet photolithographically defined ultra-thin films

1994-03-07

1996-04-23

Nelson, Peter A.

Active solid-state devices (e.g., transistors, solid-state diode

Thin active physical layer which is

Tunneling through region of reduced conductivity

257 37, 427 98, H01L 2712, B05D 512

Patent

active

055106285

ABSTRACT:
Patterned surfaces for the selective adhesion and outgrowth of cells are useful in cell culture devices, prosthetic implants, and cell-based microsensors. Such surfaces may be prepared by a deep ultraviolet photolithographic technique.

REFERENCES:
patent: 3884704 (1975-05-01), Bantell
patent: 4199649 (1980-04-01), Yundt
patent: 4539061 (1985-09-01), Sagiv
patent: 4587203 (1986-05-01), Brault
patent: 4661372 (1987-04-01), Mance
patent: 5079600 (1992-01-01), Schnur et al.

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