Radiant energy – Irradiation of objects or material
Patent
1984-04-30
1986-03-11
Anderson, Bruce C.
Radiant energy
Irradiation of objects or material
250504R, H01L 2126
Patent
active
045756368
ABSTRACT:
Apparatus for flood exposing deep ultraviolet (DUV) photoresist material from a xenon lamp source providing pulsed radiation in the DUV range formed into an annular beam by a paraboloid reflector. The radiation beam is substantially collimated with a preferred divergence of 4.degree. for mask (imaging) development. Wafers having single-layer or multi-layer photoresist material sensitive to UV radiation are flood exposed to achieve, with high resolution, imaging, even if the photoresist layers are thin. The apparatus is also used to cure DUV-sensitive photoresist material with the radiation beam having the same or preferably greater divergence. The photoresist material is flood exposed for either imaging or curing that is both rapid and uniform.
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Anderson Bruce C.
Cohen Donald S.
Guss Paul A.
Lazar Joseph D.
Morris Birgit E.
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