Deep ultraviolet absorbent composition

Details Deep ultraviolet absorbent composition Deep ultraviolet absorbent composition

1994-07-11

1996-11-19

Lesmes, George F.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Processes of preparing a desired or intentional composition...

523456, 5253273, 525523, 525533, 528 97, 4302801, C08L 6302

Patent

active

055763596

ABSTRACT:
A deep ultraviolet absorbent comprising at least one compound having one or more glycidyl groups in the molecule and at least one anthracene derivative, and a solvent capable of dissolving these compounds is effective for preventing reflection of deep ultraviolet light from a substrate during formation of resist pattern, resulting in forming ultra-fine patterns without causing notching and halation.

REFERENCES:
patent: 4007271 (1977-02-01), Robertson
patent: 4413052 (1983-11-01), Green et al.
patent: 4843097 (1989-06-01), Shroot et al.
J. Chem. Soc. (C), The Formation of Chromanone-type Systems via the Acylation of Derivatives of 2,6-Dihydroxyanthracene, by D. W. Cameron and P. E. Sch utz, Univ. Chemical Laboratory, Cambridge, 1967.

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