Active solid-state devices (e.g. – transistors – solid-state diode – Voltage variable capacitance device – With physical configuration to vary voltage dependence
Reexamination Certificate
2011-08-30
2011-08-30
Pizarro, Marcos D (Department: 2814)
Active solid-state devices (e.g., transistors, solid-state diode
Voltage variable capacitance device
With physical configuration to vary voltage dependence
C257S314000, C257S371000, C257S315000, C257S316000, C257S318000, C257S319000, C257S320000, C257S369000, C257S327000, C257S329000, C257S330000, C257S301000, C257S532000, C257SE29325, C257SE21003, C438S243000, C438S386000
Reexamination Certificate
active
08008748
ABSTRACT:
A deep trench varactor structure compatible with a deep trench capacitor structure and methods of manufacturing the same are provided. A buried plate layer is formed on a second deep trench, while the first trench is protected from formation of any buried plate layer. The inside of the deep trenches is filled with a conductive material to form inner electrodes. At least one doped well is formed outside and abutting portions of the first deep trench and constitutes at least one outer varactor electrode. Multiple doped wells may be connected in parallel to provide a varactor having complex voltage dependency of capacitance. The buried plate layer and another doped well connected thereto constitute an outer electrode of a linear capacitor formed on the second deep trench.
REFERENCES:
patent: 5394000 (1995-02-01), Ellul et al.
patent: 6172378 (2001-01-01), Hull et al.
patent: 6452224 (2002-09-01), Mandelman et al.
patent: 6653716 (2003-11-01), Vashchenko et al.
patent: 6825546 (2004-11-01), Walker et al.
patent: 6870212 (2005-03-01), Chang et al.
patent: 7129801 (2006-10-01), Wu
patent: 2003/0030091 (2003-02-01), Bulsara et al.
patent: 2005/0045888 (2005-03-01), Kadowaki et al.
patent: 2005/0212048 (2005-09-01), Litwin
patent: 2006/0006459 (2006-01-01), Yoshikawa
patent: 2006/0189057 (2006-08-01), Delpech et al.
patent: 2007/0215953 (2007-09-01), Voldman
patent: 2007/0272961 (2007-11-01), Aitken et al.
patent: 2008/0116529 (2008-05-01), Cannon et al.
patent: 2008/0135933 (2008-06-01), Miller et al.
patent: 2008/0191314 (2008-08-01), Aitken et al.
patent: 2008/0265333 (2008-10-01), Collins et al.
International Search Report dated Feb. 23, 2010.
Collins David S.
Rassel Robert M.
Thompson Eric
Armand Marc
International Business Machines - Corporation
Kotulak, Esq. Richard M.
Pizarro Marcos D
Scully , Scott, Murphy & Presser, P.C.
LandOfFree
Deep trench varactors does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Deep trench varactors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Deep trench varactors will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2765701