Decreased actuation voltage in MEMS devices by constraining...

Details Decreased actuation voltage in MEMS devices by constraining... Decreased actuation voltage in MEMS devices by constraining...

2011-05-17

2011-05-17

Stephens, Juanita D (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S054000, C347S070000

Reexamination Certificate

active

07942508

ABSTRACT:
The present application is directed to electrostatic actuators, and methods of making electrostatic actuators. In one embodiment, an electrostatic actuator of the present application can include an electrode layer and a mechanical member. The electrode layer can include a removed portion that is free of a landing pad. The mechanical member can be positioned in proximity to the electrode layer so as to provide a gap therebetween. The mechanical member can further include a dimple structure protruding out into the gap and aligned with the removed portion of the electrode layer. When in operation, the mechanical member can be capable of deflecting toward the electrode layer. The electrostatic actuator can be used in a fluid drop ejector for ink jet recording or printing devices.

REFERENCES:
patent: 6357856 (2002-03-01), Otsuki

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